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This Document covers requirements for bulk silane (SiH4) used in the semiconductor industry
• A communication interface that transfers general-purpose data between equipment or between the host and equipment
The purpose of this document is to provide a specification for dichlorosilane (SiH2Cl2) used in the semiconductor industry
on the other hand
C00302 - SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality StdPbc-0624 This Document covers requirements forThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1992; previously published June 2011. The purpose of this Document is to provide specifications for arsine (AsH3) that is used in the semiconductor industry. This Document